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Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement by Qiangxian Huang; Satoshi Gonda; Ichiko Misumi; Osamu Sato; Taeho Keem; Tomizo Kurosawa is a Engineering article available to read on EtoBox.

What is Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement about?

Piezoelectric actuators that are used in atomic force microscopes (AFM) have undesirable properties. The nonlinear and hysteretic characteristics of piezoelectric actuators introduce geometric deformations in the reconstructed AFM images. Due to these deformations, the quantitative interpretation of the absolute dimensions of surface features is difficult and often not accurate. A real-time measuring 'Nano-metrological Atomic Force Microscope' system equipped with an ultra-high resolution three-axis laser interferometer system is developed, in which the undesirable properties of piezoelectric actuators are compensated completely. Using this AFM and a one-dimensional (1D) grating reference standard with pitches of 240 nm, which is one of the widely used reference standards as nano-metrological lateral scales, the influences of nonlinear and hysteretic characteristics of piezoelectric actuators on image reconstruction and lateral dimension measurement are examined and compared quantitatively among three different measurement methods. The three measurement methods are: (1) the relative movement between probe tip and sample is controlled and measured directly by voltage signals applied

Who reads Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement?

Author

Qiangxian Huang; Satoshi Gonda; Ichiko Misumi; Osamu Sato; Taeho Keem; Tomizo Kurosawa

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

2006

Language

EN

Field

Engineering (Physical Sciences)