About this scholarly article

2009 IEEE Workshop on Microelectronics and Electron Devices - Integration of IC Industry Feature Sizes with University Back-End-of-Line Post Processing: Example Using a Phase-Change Memory Test Chip by Regner, Jennifer; Balasubramanian, M.; Cook, Beth; Li, Yingting; Kassayebetre, Hiwot; Sharma, Anshika; Baker, R. Jacob; Campbell, Kristy A. is a scholarly article available to read on EtoBox.

Author

Regner, Jennifer; Balasubramanian, M.; Cook, Beth; Li, Yingting; Kassayebetre, Hiwot; Sharma, Anshika; Baker, R. Jacob; Campbell, Kristy A.

Publisher

IEEE

Published

2009