About this scholarly article

2009 IEEE International Conference on 3D System Integration - Wet-process deposition of TSV liner and metal films by Truzzi, Claudio; Raynal, Frederic; Mevellec, Vincent is a scholarly article available to read on EtoBox.

Author

Truzzi, Claudio; Raynal, Frederic; Mevellec, Vincent

Publisher

IEEE

Published

2009

Language

EN