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About this Engineering article
A Numerical Study on Tuned Substrate Self-Bias in a Radio-Frequency Inductively Coupled Plasma by Longwei, Chen; Zhenfeng, Ding; Younian, Wang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Longwei, Chen; Zhenfeng, Ding; Younian, Wang
- Publisher
- IOP Publishing; Institute of Physics Publishing (ISSN 1009-0630)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
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