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What is Omega-Phi GID for Thin Film Stress Measurement about?

This article revisits the grazing incidence diffraction (GID) method in side inclination mode for measuring residual stress in polycrystalline thin films, specifically addressing the issue of decreasing peak intensity due to the Eulerian cradle Chi-tilt. An improved Omega-Phi compensated GID method is introduced, which maintains a constant incident angle and fixed sample illumination volume, resulting in a measured tensile stress of 1181 ± 85 MPa in a NiFe thin-film sample. The paper details the geometric r

Author

maryam shah

Language

EN