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About this Materials Science article
Influence of RF power on structure and electrical properties of sputtered SrHfON thin films by Li-ping Feng; Zheng-tang Liu; Hao Tian; Lu Liu is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Li-ping Feng; Zheng-tang Liu; Hao Tian; Lu Liu
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-577X)
- Published
- 2012
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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