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About this Engineering article
The mechanism of single-step liftoff with chlorobenzene in a diazo-type resist : R. M. Halverson, M. W. Macintyre and W. T. Motsiff. IBM Jl Res. Dev.26 (5), 590 (1982) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1983
- Language
- EN
- Field
- Engineering (Physical Sciences)