About this scholarly article

SPIE Proceedings [SPIE Smart Materials, Structures, and Systems - Bangalore, India (Thursday 12 December 2002)] Smart Materials, Structures, and Systems - Analysis challenges for reliability improvement in silicon micromachined devices by Radhakrishnan, M. K.; Mohan, S.; Dattaguru, B.; Gopalakrishnan, S. is a scholarly article available to read on EtoBox.

Author

Radhakrishnan, M. K.; Mohan, S.; Dattaguru, B.; Gopalakrishnan, S.

Publisher

SPIE

Published

2003