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About this Engineering article
Sheet resistance variations of phosphorus implanted silicon at elevated temperatures : D. G. Beanland, W. Temple and D. J. Chivers. Solid-St. Electron. 21, 357 (1978) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1978
- Field
- Engineering (Physical Sciences)