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About this Engineering article
Divinyloxyalkane Cross-linker on DUV Photoresist. by Watanabe, Hirohmi; Maeshima, Kei'ichi; Aoai, Toshiaki; Kondo, Syun'ichi; Naitoh, Takuya; Ohfuji, Takeshi; Sasago, Masaru; Miyagawa, Nobukazu; Takahara, Shigeru; Yamaoka, Tsuguo is a Engineering article available to read on EtoBox.
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- Author
- Watanabe, Hirohmi; Maeshima, Kei'ichi; Aoai, Toshiaki; Kondo, Syun'ichi; Naitoh, Takuya; Ohfuji, Takeshi; Sasago, Masaru; Miyagawa, Nobukazu; Takahara, Shigeru; Yamaoka, Tsuguo
- Publisher
- Japan Science and Technology Information Aggregator, Electronic; The Technical Association of Photopolymers, Japan; Technical Association of Photopolymers; Technical Association of Photopolymers, Japan (ISSN 0914-9244)
- Published
- 1998
- Field
- Engineering (Physical Sciences)