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About this Engineering article
Reducing Thickness Deviation of W-Shaped Structures in Manufacturing DRAM Products Using RSM and ANN_GA by Leu, Yungho (author);Lin, Chia-Ming (author);Yang, Wei-Ning (author) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Leu, Yungho (author);Lin, Chia-Ming (author);Yang, Wei-Ning (author)
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Published
- 2021
- Language
- EN
- Field
- Engineering (Physical Sciences)
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