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Can I read Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 on EtoBox?

Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 by David G. Seiler; Alain C. Diebold; Thomas J. Shaffner; Robert McDonald; W. Murray Bullis; Patrick J. Smith; Erik M. Secula is a engineering available to read on EtoBox.

What is Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 about?

The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm. Some of the challenges are materials-related, such as transistors with high-k dielectrics and on-chip interconnects made from copper and low-k dielectrics. The magnitude of these challenges demands special attention from those in the metrology and analytical measurements community. Characterization and metrology are key enablers for deve

Who reads Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000?

It is typically read by working professionals who need an authoritative practice reference.

Common subject areas: medicine, law, business, engineering.

Author
David G. Seiler; Alain C. Diebold; Thomas J. Shaffner; Robert McDonald; W. Murray Bullis; Patrick J. Smith; Erik M. Secula
Publisher
American Institute of Physics Springer [distributor
Published
2000
Language
EN
ISBN
9781563969676
Category
engineering
Subjects
Engineering, Mathematics, Science
Updated
2026-03-25

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