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About this Materials Science article
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals by Klaus Prume; Paul Muralt; Florian Calame; Thorsten Schmitz-Kempen; Stephan Tiedke is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Klaus Prume; Paul Muralt; Florian Calame; Thorsten Schmitz-Kempen; Stephan Tiedke
- Publisher
- Springer US; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC (ISSN 1385-3449)
- Published
- 2007
- Field
- Materials Science (Physical Sciences)