Opening book details…
About this Engineering article
Precursor-dependent structural and electrical characteristics of atomic layer deposited films: Case study on titanium oxide by Indrek Jõgi; Kaupo Kukli; Jaan Aarik; Aleks Aidla; Jun Lu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Indrek Jõgi; Kaupo Kukli; Jaan Aarik; Aleks Aidla; Jun Lu
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 1369-8001)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
More by Indrek Jõgi; Kaupo Kukli; Jaan Aarik; Aleks Aidla; Jun Lu
Browse all works by Indrek Jõgi; Kaupo Kukli; Jaan Aarik; Aleks Aidla; Jun Lu