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About this Engineering article
Highly c-axis oriented AlN layers grown on c-plane sapphire substrates by radio-frequency sputter epitaxy at 1080 °C by Nobuki Mutsukura; Hiroyuki Shinoda is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Nobuki Mutsukura; Hiroyuki Shinoda
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2012
- Field
- Engineering (Physical Sciences)