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Performance of hydrothermal PZT film on high intensity operation by Takefumi Kanda; Minoru Kuribayashi Kurosawa; Hidehiko Yasui; Toshiro Higuchi is a Engineering article available to read on EtoBox.

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The deposition processes of PZT thin ®lms have been described in many reports, yet there have been no descriptions of the performance of PZT ®lms at high intensity operation. Hydrothermally-deposited PZT ®lm transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT ®lm expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using ®lms formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the ®lm was 38 mm and the driving voltage was 145 V p±p . This velocity value was much larger than bulk PZT materials for high power applications.

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Author

Takefumi Kanda; Minoru Kuribayashi Kurosawa; Hidehiko Yasui; Toshiro Higuchi

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

2001

Language

EN

Field

Engineering (Physical Sciences)