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About this Physics and Astronomy article
Stresses, Curvatures, and Shape Changes Arising from Patterned Lines on Silicon Wafers by Shen, Y.-L.; Suresh, S.; Blech, I. A. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Shen, Y.-L.; Suresh, S.; Blech, I. A.
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 1996
- Field
- Physics and Astronomy (Physical Sciences)