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This document summarizes a research paper that presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano-robotic applications. The paper describes: 1) The calibration of a piezoresistive MEMS cantilever to enable sensing of gripping and contact forces in the nanonewton resolution by measuring changes in stress-induced electrical resistances. 2) An analysis of the interaction forces between a cantilever tip and material surface, and investigation of associated manipulation st

Author

meetu

Language

EN