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What is Understanding MEMS: Components & Applications about?

This document provides an overview of microelectromechanical systems (MEMS). It discusses the basic components of MEMS including micro actuators and sensors. It also describes different classifications and fabrication methods for MEMS, such as bulk micromachining, surface micromachining, and LIGA technology. Finally, it outlines several advantages and applications of MEMS in areas like instrumentation, medical devices, mobile communications, and optical systems.

Author

Nishiya Vijayan

Language

EN