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What is Nanoscale Surface Roughness Measurement about?
This paper presents a non-destructive method for measuring the surface roughness of precision parts using frequency-domain interferometry and the Hanning window energy center method. The system achieves a peak signal-to-noise ratio of 50-60 dB, with a theoretical measurement accuracy of 5 nm and a maximum repeatability error of 7 nm, validated against atomic force microscopy results. This method offers a faster and more accurate approach to surface roughness measurement, addressing limitations of traditiona
- Author
- monohsieh
- Language
- EN