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About this Engineering article
Investigation of etching Al and AlSix in the discharge of Cl-containing gases: A P Avtjushkov, G I Melyanets and A F Stekolnikov, Minsk Radioengineering Institute, P Brovka st 6, Minsk, 220069, USSR is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1988
- Language
- EN
- Field
- Engineering (Physical Sciences)