About this scholarly article

2015 China Semiconductor Technology International Conference - Process loading reduction on SADP FinFET etch by Yan Wang, ; Fangyuan Xiao, ; Dongjiang Wang, ; Qiuhua Han, ; Haiyang Zhang, is a scholarly article available to read on EtoBox.

Author

Yan Wang, ; Fangyuan Xiao, ; Dongjiang Wang, ; Qiuhua Han, ; Haiyang Zhang,

Publisher

IEEE

Published

2015