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Auto-Alignment Method for Ellipsometer by macego60 is a document available to read on EtoBox.

What is Auto-Alignment Method for Ellipsometer about?

The document presents a new two-step auto-alignment algorithm for the specimen stage of an ellipsometer. The algorithm uses one additional laser diode and photo diode to correct errors in the tilt angle and position of the specimen stage. This is done by locating the reflected light spot at the center of the detector at two different angles of incidence or orientations. The method requires only a single additional laser diode and photo diode. Model simulations showed the two-step algorithm works well and is

Author

macego60

Language

EN