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About this Engineering article
Microstructural evolution of AlN coatings synthesized by unbalanced magnetron sputtering by C. C. Wang; C. J. Lu; M. H. Shiao; F. S. Shieu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C. C. Wang; C. J. Lu; M. H. Shiao; F. S. Shieu
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2005
- Field
- Engineering (Physical Sciences)
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