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Can I read Fabrication of Biopolymer Cantilevers Using Nanoimprint Lithography on EtoBox?
Fabrication of Biopolymer Cantilevers Using Nanoimprint Lithography by Stephan S. Keller; Nikolaj Feidenhans’l; Nis Fisker-Bødker; Damien Soulat; Anders Greve; David V. Plackett; Anja Boisen is a Engineering article available to read on EtoBox.
What is Fabrication of Biopolymer Cantilevers Using Nanoimprint Lithography about?
The biodegradable polymer poly(L-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 lm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young's modulus of the device material.
Who reads Fabrication of Biopolymer Cantilevers Using Nanoimprint Lithography?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Stephan S. Keller; Nikolaj Feidenhans’l; Nis Fisker-Bødker; Damien Soulat; Anders Greve; David V. Plackett; Anja Boisen
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)