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About this Engineering article
Preparation of Low Temperature Polysilicon Films with SiH4 and SiF4 Gas Mixtures by Choi, H.S.; Jang, K.H.; Han, Min Koo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Choi, H.S.; Jang, K.H.; Han, Min Koo
- Publisher
- Trans Tech Publications, Ltd.; Scientific.net; Scitec Publications Ltd. (ISSN 1662-9779)
- Published
- 1996
- Field
- Engineering (Physical Sciences)