About this scholarly article

SPIE Proceedings [SPIE Photonics Asia - Beijing, China (Monday 5 November 2012)] Optoelectronic Devices and Integration IV - Selective etching of GaAs/Si and InP/GaAs heteroepitaxial wafer by Zhen, Xiong; Wang, Qi; Jia, Zhi-Gang; Huang, Yong-Qing; Ren, Xiao-Min; Zhang, Xuping; Ming, Hai; Therrien, Joel M. is a scholarly article available to read on EtoBox.

Author

Zhen, Xiong; Wang, Qi; Jia, Zhi-Gang; Huang, Yong-Qing; Ren, Xiao-Min; Zhang, Xuping; Ming, Hai; Therrien, Joel M.

Publisher

SPIE

Published

2012