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About this Engineering article
Low-energy Ion Bombardment Effects in Reactive Rf Magnetron Sputtering of Carbon Nitride Films by R Kaltofen; T Sebald; G Weise is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- R Kaltofen; T Sebald; G Weise
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1997
- Field
- Engineering (Physical Sciences)