About this Engineering article
Modeling and simulation of blanket chemical vapor deposition of WSix from WF6/Si2H6 by Yasuyuki Egashira; Hirofumi Aita; Takeyasu Saito; Yukihiro Shimogaki; Hiroshi Komiyama; Katsuro Sugawara is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yasuyuki Egashira; Hirofumi Aita; Takeyasu Saito; Yukihiro Shimogaki; Hiroshi Komiyama; Katsuro Sugawara
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Scripta Technica; Wiley (ISSN 8756-663X)
- Published
- 1996
- Field
- Engineering (Physical Sciences)