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About this Engineering article
Ultrahigh Purity Conditions for Nitride Growth with Low Oxygen Content by Plasma-enhanced Atomic Layer Deposition by Rayner, Gilbert B.; OâToole, Noel; Shallenberger, Jeffrey; Johs, Blaine is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Rayner, Gilbert B.; OâToole, Noel; Shallenberger, Jeffrey; Johs, Blaine
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2020
- Field
- Engineering (Physical Sciences)
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