Can I read New Microelectrodes for the Investigation Ofthe Electroforming of Liga Microstructures on EtoBox?

New Microelectrodes for the Investigation Ofthe Electroforming of Liga Microstructures by K. Leyendecker; W. Bacher; W. Stark; A. Thommes is a Engineering article available to read on EtoBox.

What is New Microelectrodes for the Investigation Ofthe Electroforming of Liga Microstructures about?

Electroforming of microstructures is an important method for manufacturing sensors and actuators within the LIGA process and for their integration into microsystems The LIGA technique, shown in Fig 1, allows microstructures of almost any lateral shape to be fabricated with structural heights of several hundred micrometers, lateral dimensions down to one micrometer, and submicron accuracy over the total height of the structure [1][2][3] In the electroforming step, small gaps as well as large structures on one substrate have to be filled Metal Depssift ## Sblppbig of the Elpossed Ream "~~~i~~11111 Fig 1 Process steps of the LIGA technique 0013-46g6(94)E0028-R

Who reads New Microelectrodes for the Investigation Ofthe Electroforming of Liga Microstructures?

Author

K. Leyendecker; W. Bacher; W. Stark; A. Thommes

Publisher

Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0013-4686)

Published

1994

Language

EN

Field

Engineering (Physical Sciences)