About this Engineering article
Modeling an Inductively Coupled Plasma Source by Paranjpe, A. P. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Paranjpe, A. P.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1994
- Field
- Engineering (Physical Sciences)