Can I read Ol 42 24 5070 on EtoBox?
Ol 42 24 5070 by legendsupercd is a document available to read on EtoBox.
What is Ol 42 24 5070 about?
The document discusses high-reflection Mo/Be/Si multilayers for extreme ultraviolet (EUV) lithography, highlighting the impact of Be layers on the reflection coefficients. The study shows that optimized multilayers can achieve reflection coefficients above 71% at 13.5 nm and 72% at 12.9 nm, with potential for further improvement through interface engineering. The findings are significant for enhancing the efficiency of EUV lithography systems.
- Author
- legendsupercd
- Language
- EN