About this scholarly article

ECS Transactions - Plasma-Assisted ALD of Al2O3 at Low Temperatures: Reaction Mechanisms and Material Properties by Langereis, Erik; Bouman, Menno; Keijmel, Jeroen; Heil, Stephan; Van de Sanden, M. C.; Kessels, W. M. is a scholarly article available to read on EtoBox.

Author

Langereis, Erik; Bouman, Menno; Keijmel, Jeroen; Heil, Stephan; Van de Sanden, M. C.; Kessels, W. M.

Publisher

ECS

Published

2008