About this scholarly article

SPIE Proceedings [SPIE Photonics Asia 2002 - Shanghai, China (Monday 14 October 2002)] Holography, Diffractive Optics, and Applications - Diffraction-based analysis of effects of fabricating and installation errors on a nano-alignment system by Chen, Yuhang; Huang, Wenhao; Hsu, Dahsiung; Chen, Jiabi; Sheng, Yunlong is a scholarly article available to read on EtoBox.

Author

Chen, Yuhang; Huang, Wenhao; Hsu, Dahsiung; Chen, Jiabi; Sheng, Yunlong

Publisher

SPIE

Published

2002

Language

EN