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What is MPCVD Reactor Simulation about?
This thesis presents a numerical simulation of hydrogen plasma in an MPCVD reactor, aimed at estimating plasma properties for diamond and graphitic nano-petal synthesis. The study utilizes COMSOL Multiphysics to model the electromagnetic and heat transfer simulations under various conditions, validating the results against ANSYS HFSS. Key findings include the relationship between electrical field strength, electron density, and temperature with varying power input and pressure.
- Author
- Guiping Xu
- Language
- EN