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About this Engineering article
Implementation of a geometrically based criterion for film uniformity control in a planetary SiC CVD reactor system by Rinku P. Parikh; Raymond A. Adomaitis; James D. Oliver; Brian H. Ponczak is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Rinku P. Parikh; Raymond A. Adomaitis; James D. Oliver; Brian H. Ponczak
- Publisher
- Elsevier Science; Elsevier ; Butterworth Scientific Ltd.; Elsevier BV (ISSN 0959-1524)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)
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