About this scholarly article

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Thin beam bulk micromachining based on RIE and xenon difluoride silicon etching by Toda, R.; Minami, K.; Esashi, M. is a scholarly article available to read on EtoBox.

Author

Toda, R.; Minami, K.; Esashi, M.

Publisher

IEEE

Published

1997