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What is Low-Voltage Vertical RF-MEMS Switch Design about?

This document presents a novel design for a vertical RF-MEMS switch that operates at a low actuation voltage of 3 Volts while achieving excellent RF performance, including an isolation factor of -47 dB and insertion loss ranging from -0.01 to -1.10 dB across a frequency range of 1 to 40 GHz. The switch utilizes a shunt capacitive configuration with a bridge membrane actuated electrostatically, and the design process involves various fabrication techniques to optimize performance. Simulation results demonstr

Author

chenyangchao1314

Language

EN