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About this Materials Science article
Phase diagrams for Si:H film growth by plasma-enhanced chemical vapor deposition by A.S Ferlauto; R.J Koval; C.R Wronski; R.W Collins is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- A.S Ferlauto; R.J Koval; C.R Wronski; R.W Collins
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-3093)
- Published
- 2002
- Field
- Materials Science (Physical Sciences)
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