Opening book details…
About this Engineering article
Nondestructive Analytical Tools for Characterization of Thin Titanium Silicide Films Prepared by Conventional and Direct Step Silicidation with Enhanced Transition by Kal, S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kal, S.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)