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Can I read As grown Bi2Sr2CaCu2Oy films by an off axis RF magnetron on EtoBox?
As grown Bi2Sr2CaCu2Oy films by an off axis RF magnetron by J.H. Lu; H.C. Yang; H.E. Horng is a Physics and Astronomy article available to read on EtoBox.
What is As grown Bi2Sr2CaCu2Oy films by an off axis RF magnetron about?
Bi2Sr2CaCu2Oy (BSCCO) films were in intu grown by an off axis rf magnetron sputtering. The sputtering targets were stoichiometric Bi2Sr2CaCu2Oy compounds. The sputtering gas was a mixture of 0 2 and Ar and the sputtering pressure varied from 50 -100 mTorr. The films were grown at 570 -600 °C. After growth the films were quickly cooled down to 300 K in 30 minutes. One found that the distance from the substrate to the target d is an important factor in affecting the deposition rate of the as grown BSCCO films• By reducing the distance d to 3 cm, we have achieved a deposition rate of about 1500A per hour in a sputtering power of 60 watts and sputtering pressure of 70 mtorr. With optimum growth conditions where the substrate temperature was kept at 580 -600 °C and the pressure was kept at 70 -80 mTorr, superconducting BSCCO films with zero resistance at 75 -85 K can be reproduced.
Who reads As grown Bi2Sr2CaCu2Oy films by an off axis RF magnetron?
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- J.H. Lu; H.C. Yang; H.E. Horng
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0921-4526)
- Published
- 1994
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)