About this scholarly article

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology by Xu, Wei; Gao, Bo; Ma, Shenhui; Zhang, Anping; Chiu, Yi; Lee, Yi-Kuen is a scholarly article available to read on EtoBox.

Author

Xu, Wei; Gao, Bo; Ma, Shenhui; Zhang, Anping; Chiu, Yi; Lee, Yi-Kuen

Publisher

IEEE

Published

2016

Language

EN