About this scholarly article

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer scale fabrication of highly integrated rubidium vapor cells by Overstolz, T.; Haesler, J.; Bergonzi, G.; Pezous, A.; Clerc, P.-A.; Ischer, S.; Kaufmann, J.; Despont, M. is a scholarly article available to read on EtoBox.

Author

Overstolz, T.; Haesler, J.; Bergonzi, G.; Pezous, A.; Clerc, P.-A.; Ischer, S.; Kaufmann, J.; Despont, M.

Publisher

IEEE

Published

2014