About this scholarly article

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Device Technology II - Material study of indium implant under channel doping conditions by Liu, Jinning; Mehta, Sandeep; Daryanani, Sonu L.; Ng, Che-Hoo; Burnett, David; Wristers, Dirk; Tsuchiya, Toshiaki is a scholarly article available to read on EtoBox.

Author

Liu, Jinning; Mehta, Sandeep; Daryanani, Sonu L.; Ng, Che-Hoo; Burnett, David; Wristers, Dirk; Tsuchiya, Toshiaki

Publisher

SPIE

Published

1998

Language

EN