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About this Engineering article
High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition by Spiller, Eberhard ;Baker, Sherry L. ;Mirkarimi, Paul B. ;Sperry, Victor ;Gullikson, Eric M. ;Stearns, Daniel G. is a Engineering article available to read on EtoBox.
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- Author
- Spiller, Eberhard ;Baker, Sherry L. ;Mirkarimi, Paul B. ;Sperry, Victor ;Gullikson, Eric M. ;Stearns, Daniel G.
- Publisher
- The Optical Society; Optical Society of America (ISSN 1559-128X)
- Published
- 2003
- Field
- Engineering (Physical Sciences)