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About this Engineering article
Grain Growth and Conductive Characteristics of Super Thin Polysilicon Films by Oxidation by T. Noguchi; H. Hayashi; T. Ohshima is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T. Noguchi; H. Hayashi; T. Ohshima
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1985
- Field
- Engineering (Physical Sciences)