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About this scholarly article
SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Electron-Beam Sources of High-Brightness Radiation - Synchrotrons for x-ray lithography by Younger, Francis C.; Trippe, Anthony P.; Freund, Henry P. is a scholarly article available to read on EtoBox.
- Author
- Younger, Francis C.; Trippe, Anthony P.; Freund, Henry P.
- Publisher
- SPIE
- Published
- 1993
- Language
- EN
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