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About this Engineering article
Modeling particle formation during low-pressure silane oxidation: Detailed chemical kinetics and aerosol dynamics by Suh, S.-M. ;Zachariah, M. R. ;Girshick, S. L. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Suh, S.-M. ;Zachariah, M. R. ;Girshick, S. L.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2001
- Field
- Engineering (Physical Sciences)
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