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About this Engineering article
Formation of Au Nanoparticles and Features of Etching of a Si Substrate under Irradiation with Atomic and Molecular Ions by Tuzhilkin, M. S.; Bespalova, P. G.; Mishin, M. V.; Kolesnikov, I. E.; Karabeshkin, K. V.; Karaseov, P. A.; Titov, A. I. is a Engineering article available to read on EtoBox.
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- Author
- Tuzhilkin, M. S.; Bespalova, P. G.; Mishin, M. V.; Kolesnikov, I. E.; Karabeshkin, K. V.; Karaseov, P. A.; Titov, A. I.
- Publisher
- Springer; Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1063-7826)
- Published
- 2020
- Field
- Engineering (Physical Sciences)